$WiMi Hologram Cloud (WIMI.US)$ Digital holography is a high...

Digital holography is a high-resolution imaging technique based on optical principles that records and analyzes wavefront information about a target object. By utilizing deep ultraviolet laser illumination and phase difference analysis, the technique is able to accurately detect defects as small as a few nanometers on structures with high aspect ratios. Compared to traditional defect detection methods, digital holography has the advantages of higher sensitivity, better resolution, and non-destructive testing. Defect detection on semiconductor wafers has always been an integral part of the semiconductor manufacturing process. As the size of semiconductor devices continues to shrink and process complexity, traditional defect detection methods are facing challenges. To address this issue, WiMi's R&D team has successfully introduced digital holography into the defect inspection of semiconductor wafers through their tireless efforts.