share_log

ClassOne Equipment Delivers Advanced 300mm Takano Particle Detection System to EUV Tech

ClassOne Equipment Delivers Advanced 300mm Takano Particle Detection System to EUV Tech

ClassOne 设备向 EUV Tech 提供先进的 300 毫米高野粒子探测系统
PR Newswire ·  2023/06/05 08:29

ATLANTA, June 5, 2023 /PRNewswire/ -- ClassOne Equipment (classoneequipment.com), announced the delivery of its advanced new Takano WM-10 particle measurement system to EUV Tech, a global leader in metrology equipment for cutting-edge EUV chip manufacturing. The announcement was made by ClassOne Equipment Vice President, David Pawlak, and EUV Tech Vice President of R&D, Matt Hettermann.

亚特兰2023年6月5日 /PRNewswire/ — ClassOne Equipment(classonequipment.com)宣布向用于尖端 EUV 芯片制造的计量设备的全球领导者 EUV Tech 交付其先进的新型 Takano WM-10 粒子测量系统。该公告是由ClassOne设备副总裁发布的, 大卫帕拉克,以及 EUV Tech 研发副总裁, 马特·海特曼

Continue Reading
继续阅读
Takano WM-10 Particle Detection System from ClassOne Equipment
来自 ClassOne 设备的 Takano WM-10 粒子检测系统

Said Hettermann, "A key factor in our selecting the new 300mm Takano WM-10 system was its very high-sensitivity particle detection. For us, particle sensitivity is critical because we are using the new Takano tool to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft-x-ray systems in the industry."

海特曼说:“我们选择新的 300mm Takano WM-10 系统的关键因素是其非常高的灵敏度粒子检测。对我们来说,粒子灵敏度至关重要,因为我们正在使用新的Takano工具来验证我们建造的设备的清洁度,这些设备是业内最先进的EUV和软X射线系统之一。”

"We have the new WM-10 running in our fab in Martinez, California," added Hettermann. "And we're already seeing the outstanding performance it delivers – routinely detecting particles down to 48nm. Plus, it's configured to handle not only 300mm wafers but also 200mm and 150mm."

“我们的工厂里正在运行新的 WM-10 加利福尼亚州马丁内斯,” 海特曼补充说。“而且我们已经看到了它所提供的出色性能——可以例行检测低至 48nm 的粒子。另外,它的配置不仅可以处理 300 毫米晶圆,还能处理 200 毫米和 150 毫米的晶圆。”

Pawlak pointed out that Takano-brand particle detection systems are among the top-selling new tools in ClassOne Equipment's product lineup. Along with best-in-class detection sensitivity, the Takano equipment provides high throughput, repeatability and reliability, plus a suite of options. And very importantly, the systems are attractively priced and readily available. These are also some of the reasons why Takano is becoming the new-technology replacement-of-choice for legacy Surfscan systems, which for many years were an industry "standard" for wafer particle detection.

帕拉克指出,高野品牌的粒子探测系统是ClassOne Equipment产品阵容中最畅销的新工具之一。除了一流的检测灵敏度外,Takano 设备还提供高吞吐量、可重复性和可靠性,以及一系列选项。非常重要的是,这些系统的价格诱人且随时可用。这些也是Takano成为传统Surfscan系统的首选新技术替代品的部分原因,传统的Surfscan系统多年来一直是晶圆颗粒检测的行业 “标准”。

ClassOne Equipment is the exclusive source for sales, service and complete support of Takano-brand particle detection systems across North America and Europe. ClassOne maintains a team of specially-trained field engineers to provide installations, PMs and all other services on Takano systems.

ClassOne Equipment 是 Takano 品牌粒子探测系统的独家销售、服务和全面支持来源 北美欧洲。ClassOne 拥有一支由经过专门培训的现场工程师组成的团队,负责在 Takano 系统上提供安装、项目经理和所有其他服务。

In addition to the all-new Takano systems, ClassOne Equipment also offers a broad selection of previously-owned semiconductor equipment, including many tools that are totally refurbished and literally better-than-new. The company also provides thousands of top-quality OEM parts, as well as equipment service, support, warranties, financing, and much more. All may be seen at classoneequipment.com. For further information, contact [email protected].

除了全新的Takano系统外,ClassOne Equipment还提供各种以前拥有的半导体设备,包括许多经过全面翻新且实际上比新更好的工具。该公司还提供数千种高质量的 OEM 零件,以及设备服务、支持、保修、融资等。都可以在 classonequipment.com 上看到。欲了解更多信息,请联系 [电子邮件保护]

About ClassOne Equipment
Headquartered in Atlanta, Georgia, ClassOne Equipment (classoneequipment.com) has long been known as the industry's premier provider of previously-owned and professionally-refurbished name-brand semiconductor processing equipment – delivering like-new performance at a fraction of new-tool cost. In addition, ClassOne now sells and fully supports the Takano line of all-new high-performance wafer particle inspection systems. ClassOne Equipment supplies a broad spectrum of turnkey solutions that can include not just tools but also spare parts, installation, service, support, warranty, financing and more.

关于 ClassOne 设备
总部位于 乔治亚州亚特兰,ClassOne Equipment(classonequipment.com)长期以来一直被誉为业内先前拥有和经过专业翻新的名牌半导体加工设备的主要提供商——以新工具成本的一小部分提供类似于新工具的性能。此外,ClassOne 现在销售并完全支持 Takano 系列的全新高性能晶圆颗粒检测系统。ClassOne Equipment 提供广泛的交钥匙解决方案,不仅包括工具,还包括备件、安装、服务、支持、保修、融资等。

About EUV Tech
Founded in 1997 and headquartered in Martinez, California, EUV Tech (euvtech.com) is a global leader in the production of at-wavelength EUV metrology tools. The company supplies leading-edge solutions using extreme ultraviolet and soft x-ray technology to advance the frontiers of semiconductor manufacturing and material science. The company develops and manufactures mask metrology equipment that enables high-volume manufacturing using EUV lithography. Their systems include EUV reflectometers, EUV pellicle tools, EUV phase metrology tools, and EUV mask imaging tools.

关于 EUV Tech
成立于 1997 年,总部位于 加利福尼亚州马丁内斯,EUV Tech(euvtech.com)是生产波长 EUV 计量工具的全球领导者。该公司使用极紫外线和软 X 射线技术提供领先的解决方案,以推进半导体制造和材料科学的前沿。该公司开发和制造口罩计量设备,可使用EUV光刻进行大批量生产。他们的系统包括 EUV 反射计、EUV 薄膜工具、EUV 相位计量工具和 EUV 掩模成像工具。

For more information, contact:

欲了解更多信息,请联系:

Byron Exarcos
ClassOne Equipment
5302 Snapfinger Woods Drive
Atlanta, GA 30035
tel: +1 (678) 772-9086
email: [email protected]

Byron Exarcos
一类设备
5302 Snapfinger 伍兹大道
乔治亚州亚特兰 30035
电话:+1 (678) 772-9086
电子邮件: [电子邮件保护]

SOURCE ClassOne Equipment

来源 ClassOne 设备

声明:本内容仅用作提供资讯及教育之目的,不构成对任何特定投资或投资策略的推荐或认可。 更多信息
    抢沙发