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ClassOne Equipment Delivers Advanced 300mm Takano Particle Detection System to EUV Tech

ClassOne Equipment Delivers Advanced 300mm Takano Particle Detection System to EUV Tech

ClassOne 設備向 EUV Tech 提供先進的 300 毫米高野粒子探測系統
PR Newswire ·  2023/06/05 08:29

ATLANTA, June 5, 2023 /PRNewswire/ -- ClassOne Equipment (classoneequipment.com), announced the delivery of its advanced new Takano WM-10 particle measurement system to EUV Tech, a global leader in metrology equipment for cutting-edge EUV chip manufacturing. The announcement was made by ClassOne Equipment Vice President, David Pawlak, and EUV Tech Vice President of R&D, Matt Hettermann.

亞特蘭2023年6月5日 /PRNewswire/ — ClassOne Equipment(classonequipment.com)宣佈向用於尖端 EUV 芯片製造的計量設備的全球領導者 EUV Tech 交付其先進的新型 Takano WM-10 粒子測量系統。該公告是由ClassOne設備副總裁發佈的, 大衛帕拉克,以及 EUV Tech 研發副總裁, 馬特·海特曼

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Takano WM-10 Particle Detection System from ClassOne Equipment
來自 ClassOne 設備的 Takano WM-10 粒子檢測系統

Said Hettermann, "A key factor in our selecting the new 300mm Takano WM-10 system was its very high-sensitivity particle detection. For us, particle sensitivity is critical because we are using the new Takano tool to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft-x-ray systems in the industry."

海特曼說:“我們選擇新的 300mm Takano WM-10 系統的關鍵因素是其非常高的靈敏度粒子檢測。對我們來說,粒子靈敏度至關重要,因爲我們正在使用新的Takano工具來驗證我們建造的設備的清潔度,這些設備是業內最先進的EUV和軟X射線系統之一。”

"We have the new WM-10 running in our fab in Martinez, California," added Hettermann. "And we're already seeing the outstanding performance it delivers – routinely detecting particles down to 48nm. Plus, it's configured to handle not only 300mm wafers but also 200mm and 150mm."

“我們的工廠里正在運行新的 WM-10 加利福尼亞州馬丁內斯,” 海特曼補充說。“而且我們已經看到了它所提供的出色性能——可以例行檢測低至 48nm 的粒子。另外,它的配置不僅可以處理 300 毫米晶圓,還能處理 200 毫米和 150 毫米的晶圓。”

Pawlak pointed out that Takano-brand particle detection systems are among the top-selling new tools in ClassOne Equipment's product lineup. Along with best-in-class detection sensitivity, the Takano equipment provides high throughput, repeatability and reliability, plus a suite of options. And very importantly, the systems are attractively priced and readily available. These are also some of the reasons why Takano is becoming the new-technology replacement-of-choice for legacy Surfscan systems, which for many years were an industry "standard" for wafer particle detection.

帕拉克指出,高野品牌的粒子探測系統是ClassOne Equipment產品陣容中最暢銷的新工具之一。除了一流的檢測靈敏度外,Takano 設備還提供高吞吐量、可重複性和可靠性,以及一系列選項。非常重要的是,這些系統的價格誘人且隨時可用。這些也是Takano成爲傳統Surfscan系統的首選新技術替代品的部分原因,傳統的Surfscan系統多年來一直是晶圓顆粒檢測的行業 “標準”。

ClassOne Equipment is the exclusive source for sales, service and complete support of Takano-brand particle detection systems across North America and Europe. ClassOne maintains a team of specially-trained field engineers to provide installations, PMs and all other services on Takano systems.

ClassOne Equipment 是 Takano 品牌粒子探測系統的獨家銷售、服務和全面支持來源 北美歐洲。ClassOne 擁有一支由經過專門培訓的現場工程師組成的團隊,負責在 Takano 系統上提供安裝、項目經理和所有其他服務。

In addition to the all-new Takano systems, ClassOne Equipment also offers a broad selection of previously-owned semiconductor equipment, including many tools that are totally refurbished and literally better-than-new. The company also provides thousands of top-quality OEM parts, as well as equipment service, support, warranties, financing, and much more. All may be seen at classoneequipment.com. For further information, contact [email protected].

除了全新的Takano系統外,ClassOne Equipment還提供各種以前擁有的半導體設備,包括許多經過全面翻新且實際上比新更好的工具。該公司還提供數千種高質量的 OEM 零件,以及設備服務、支持、保修、融資等。都可以在 classonequipment.com 上看到。欲瞭解更多信息,請聯繫 [電子郵件保護]

About ClassOne Equipment
Headquartered in Atlanta, Georgia, ClassOne Equipment (classoneequipment.com) has long been known as the industry's premier provider of previously-owned and professionally-refurbished name-brand semiconductor processing equipment – delivering like-new performance at a fraction of new-tool cost. In addition, ClassOne now sells and fully supports the Takano line of all-new high-performance wafer particle inspection systems. ClassOne Equipment supplies a broad spectrum of turnkey solutions that can include not just tools but also spare parts, installation, service, support, warranty, financing and more.

關於 ClassOne 設備
總部位於 喬治亞州亞特蘭,ClassOne Equipment(classonequipment.com)長期以來一直被譽爲業內先前擁有和經過專業翻新的名牌半導體加工設備的主要提供商——以新工具成本的一小部分提供類似於新工具的性能。此外,ClassOne 現在銷售並完全支持 Takano 系列的全新高性能晶圓顆粒檢測系統。ClassOne Equipment 提供廣泛的交鑰匙解決方案,不僅包括工具,還包括備件、安裝、服務、支持、保修、融資等。

About EUV Tech
Founded in 1997 and headquartered in Martinez, California, EUV Tech (euvtech.com) is a global leader in the production of at-wavelength EUV metrology tools. The company supplies leading-edge solutions using extreme ultraviolet and soft x-ray technology to advance the frontiers of semiconductor manufacturing and material science. The company develops and manufactures mask metrology equipment that enables high-volume manufacturing using EUV lithography. Their systems include EUV reflectometers, EUV pellicle tools, EUV phase metrology tools, and EUV mask imaging tools.

關於 EUV Tech
成立於 1997 年,總部位於 加利福尼亞州馬丁內斯,EUV Tech(euvtech.com)是生產波長 EUV 計量工具的全球領導者。該公司使用極紫外線和軟 X 射線技術提供領先的解決方案,以推進半導體制造和材料科學的前沿。該公司開發和製造口罩計量設備,可使用EUV光刻進行大批量生產。他們的系統包括 EUV 反射計、EUV 薄膜工具、EUV 相位計量工具和 EUV 掩模成像工具。

For more information, contact:

欲瞭解更多信息,請聯繫:

Byron Exarcos
ClassOne Equipment
5302 Snapfinger Woods Drive
Atlanta, GA 30035
tel: +1 (678) 772-9086
email: [email protected]

Byron Exarcos
一類設備
5302 Snapfinger 伍茲大道
喬治亞州亞特蘭 30035
電話:+1 (678) 772-9086
電子郵件: [電子郵件保護]

SOURCE ClassOne Equipment

來源 ClassOne 設備

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