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台积电:仍在评估High-NA EUV 采用时间未定

Gelonghui Finance ·  Jul 30 02:39

格隆汇7月30日|台积电海外营运资深副总经理暨副共同营运长张晓强表示,仍在评估High-NA EUV应用于未来制程节点的成本效益与可扩展性,目前采用时间未定。A16制程将于2026年下半年量产,可能不会采用high-NA EUV设备。

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