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晶盛机电(300316.SZ):目前公司半导体ALD设备处于验证阶段

Zhejiang Jingsheng Mechanical & Electrical (300316.SZ): Currently, the company's semiconductor ald equipment is in the validation stage.

Gelonghui Finance ·  Sep 6 03:32

On September 6th, Jing Sheng Mechanical & Electrical (300316.SZ) stated on the investor interaction platform that the company has developed 8-12 inch reduced-pressure silicon epitaxial equipment, LPCVD, and ALD equipment in the advanced process field. Currently, the company's semiconductor ALD equipment is in the verification stage. In terms of market space, according to the statistics of Maximize Market Research, the global semiconductor thin film deposition equipment market size has increased from $12.5 billion in 2017 to $17.2 billion in 2020, with a CAGR of 11.2% during this period. In terms of the segmented product structure, it is estimated that by 2025, the market size of domestic PECVD, PVD, and ALD equipment will reach $4.6 billion, $2.9 billion, and $1.8 billion, respectively. Compared with CVD technology and PVD technology, ALD technology started its industrial application relatively late. However, due to the fact that the sputtering PVD, PECVD, and other processes used in mature processes are unable to meet the requirements of some processes under the advanced process nodes, introducing ALD process is necessary. With excellent film thickness accuracy control and high coverage, ALD equipment is expected to gradually increase its penetration rate in the fields of advanced storage and logic in the future.

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