Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Evans Eileen
Axcelis Technologies | 3: Initial statement of beneficial ownership of securities-Officer Evans Eileen
Axcelis Technologies | 4/A: Statement of changes in beneficial ownership of securities (and amendment thereto)-Officer Redinbo Greg
Axcelis Technologies | SC 13G/A: Statement of acquisition of beneficial ownership by individuals (Amendment)-BlackRock, Inc.(16.4%)
Axcelis Technologies | SC 13G/A: Statement of acquisition of beneficial ownership by individuals (Amendment)-BlackRock, Inc.(16.4%)
Axcelis Technologies | 4/A: Statement of changes in beneficial ownership of securities (and amendment thereto)-Officer COOGAN JAMES GORDON
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer COOGAN JAMES GORDON
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Tatnall Christopher
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Redinbo Greg
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Director Titinger Jorge
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Lawson Douglas A.
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Blumenstock Gerald M
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Redinbo Greg
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Low Russell
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer FALLON LYNNETTE C
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer FALLON LYNNETTE C
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Low Russell
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer Lawson Douglas A.
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Director KURTZWEIL JOHN T
Axcelis Technologies | 4: Statement of changes in beneficial ownership of securities-Officer FALLON LYNNETTE C
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